Research

Impact Determination of Particles in IC Production

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Title	Impact Determination of Particles in IC Production
Period	11 / 2005 - 11 / 2009
Status	Completed
Dissertation	Yes
Research number	OND1310390
Data Supplier	aanmelding door contactpersoon

Abstract

The aim is to develop a method to determine impact and source of random particles, which result in yield loss in semiconductor manufacturing. Subsequently, to improve the removal performance of cleaning processes that are aimed to reduce this particle contamination.

Related organisations

Secretariat	Researchgroup Semiconductor Components - SC (UT)
Collaboration	Utrecht University (UU)

Related people

Supervisor	Prof.dr. J.J. Kelly
Supervisor	Prof.dr.ir. F.G. Kuper
Researcher	Dr. D.M. Knotter
Doctoral/PhD student	F. Wali

Classification

A34000	Industrial products
D14320	Microelectronics