Hot Silicon


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Titel Hot Silicon
Looptijd 11 / 2007 - 10 / 2011
Status Lopend
Dissertatie Ja
Onderzoeknummer OND1335034
Leverancier gegevens Promotor

Samenvatting (EN)

The project aim is to design, fabricate and test CMOS-compatible chemical sensors and actuators. A variety of such sensing/actuating units can be embedded into versatile, miniature lab-on-a-chip systems. The targeted application areas are a) discrete low-power low-cost gas-, mass flow-, and humidity sensors or sensor arrays, and b) integrated on-chip units consisting of microreactors and sensors.

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