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Research

Wetting/dewetting control on wafer and wafer chuck.

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Title Wetting/dewetting control on wafer and wafer chuck.
Period 06 / 2010 - 06 / 2014
Status Current
Dissertation Yes
Research number OND1341711

Related organisations

Related people

Supervisor Prof.dr. C.J.M. van Rijn
Supervisor Prof.dr. J.T. Zuilhof
Co-supervisor Dr.ir. J.M.J. Paulusse
Doctoral/PhD student N.S. Bhairamadgi

Classification

A12000 Surfacewater and groundwater
D13300 Organic chemistry

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