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Wetting/dewetting control on wafer and wafer chuck.

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Title	Wetting/dewetting control on wafer and wafer chuck.
Period	06 / 2010 - 06 / 2014
Status	Current
Dissertation	Yes
Research number	OND1341711

Related organisations

Secretariat	Laboratory of Organic Chemistry (WUR)

Related people

Supervisor	Prof.dr. C.J.M. van Rijn
Supervisor	Prof.dr. H. Zuilhof
Co-supervisor	Dr.ir. J.M.J. Paulusse
Doctoral/PhD student	N.S. Bhairamadgi

Classification

A12000	Surfacewater and groundwater
D13300	Organic chemistry

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